Surface Acoustic Waves in Thin Films Nanometrology

Andrea Bettucci

doi:doi:10.11648/j.nsnm.20150101.13

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Surface Acoustic Waves in Thin Films Nanometrology

Andrea Bettucci

Published in Nanoscience and Nanometrology (Volume 1, Issue 1)

Received: 13 July 2015 Accepted: 28 July 2015 Published: 29 July 2015

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Abstract

Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology

Published in	Nanoscience and Nanometrology (Volume 1, Issue 1)
DOI	10.11648/j.nsnm.20150101.13
Page(s)	15-19
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2015. Published by Science Publishing Group

Keywords

Surface Acoustic Wave, Acoustic Microscope, Photoacoustics, Thin Films

References

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Andrea Bettucci. (2015). Surface Acoustic Waves in Thin Films Nanometrology. Nanoscience and Nanometrology, 1(1), 15-19. https://doi.org/10.11648/j.nsnm.20150101.13

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ACS Style

Andrea Bettucci. Surface Acoustic Waves in Thin Films Nanometrology. Nanosci. Nanometrol. 2015, 1(1), 15-19. doi: 10.11648/j.nsnm.20150101.13

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AMA Style

Andrea Bettucci. Surface Acoustic Waves in Thin Films Nanometrology. Nanosci Nanometrol. 2015;1(1):15-19. doi: 10.11648/j.nsnm.20150101.13

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@article{10.11648/j.nsnm.20150101.13,
  author = {Andrea Bettucci},
  title = {Surface Acoustic Waves in Thin Films Nanometrology},
  journal = {Nanoscience and Nanometrology},
  volume = {1},
  number = {1},
  pages = {15-19},
  doi = {10.11648/j.nsnm.20150101.13},
  url = {https://doi.org/10.11648/j.nsnm.20150101.13},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.nsnm.20150101.13},
  abstract = {Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology},
 year = {2015}
}

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TY  - JOUR
T1  - Surface Acoustic Waves in Thin Films Nanometrology
AU  - Andrea Bettucci
Y1  - 2015/07/29
PY  - 2015
N1  - https://doi.org/10.11648/j.nsnm.20150101.13
DO  - 10.11648/j.nsnm.20150101.13
T2  - Nanoscience and Nanometrology
JF  - Nanoscience and Nanometrology
JO  - Nanoscience and Nanometrology
SP  - 15
EP  - 19
PB  - Science Publishing Group
SN  - 2472-3630
UR  - https://doi.org/10.11648/j.nsnm.20150101.13
AB  - Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology
VL  - 1
IS  - 1
ER  -

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Author Information

Andrea Bettucci

Department of Basic and Applied Sciences for Engineering, Sapienza University of Rome, Via A. Scarpa 16, Rome, Italy

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APA Style

Andrea Bettucci. (2015). Surface Acoustic Waves in Thin Films Nanometrology. Nanoscience and Nanometrology, 1(1), 15-19. https://doi.org/10.11648/j.nsnm.20150101.13

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ACS Style

Andrea Bettucci. Surface Acoustic Waves in Thin Films Nanometrology. Nanosci. Nanometrol. 2015, 1(1), 15-19. doi: 10.11648/j.nsnm.20150101.13

Copy | Download

AMA Style

Andrea Bettucci. Surface Acoustic Waves in Thin Films Nanometrology. Nanosci Nanometrol. 2015;1(1):15-19. doi: 10.11648/j.nsnm.20150101.13

Copy | Download

@article{10.11648/j.nsnm.20150101.13,
  author = {Andrea Bettucci},
  title = {Surface Acoustic Waves in Thin Films Nanometrology},
  journal = {Nanoscience and Nanometrology},
  volume = {1},
  number = {1},
  pages = {15-19},
  doi = {10.11648/j.nsnm.20150101.13},
  url = {https://doi.org/10.11648/j.nsnm.20150101.13},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.nsnm.20150101.13},
  abstract = {Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology},
 year = {2015}
}

Copy | Download

TY  - JOUR
T1  - Surface Acoustic Waves in Thin Films Nanometrology
AU  - Andrea Bettucci
Y1  - 2015/07/29
PY  - 2015
N1  - https://doi.org/10.11648/j.nsnm.20150101.13
DO  - 10.11648/j.nsnm.20150101.13
T2  - Nanoscience and Nanometrology
JF  - Nanoscience and Nanometrology
JO  - Nanoscience and Nanometrology
SP  - 15
EP  - 19
PB  - Science Publishing Group
SN  - 2472-3630
UR  - https://doi.org/10.11648/j.nsnm.20150101.13
AB  - Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology
VL  - 1
IS  - 1
ER  -

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