Carbon nanotubes (CNTs) have attracted increasing attention due to their superior physical and chemical properties such as their high electrical and thermal conductivity, great specific area, etc. Scanning electron microscopy on commercial CNTs was optimized. Based of Rayleigh level, the resolution of optical system was induced by substituting parameters of thermoelectric emission scanning electron microscope. The size of interaction range of electron-CNTs is evaluated by substituting parameters of CNTs into the equation evaluating size of Kanaya-Okayama range. Based on theoretical analytical results, the high voltage range is defined in fine structure observation of CNTs surface by thermoelectric emission scanning electron microscope. We selected the spot size as 1.5nm, the working distance as 4.3mm, and did the SEM measurement experiment changing the accelerating voltage. The effects of energy of the incident electron on the size of the electron-CNTs interaction range and the resolution of SEM were theoretically investigated. As a result, in case of microstructure observation of CNTs surface by using thermoelectric SEM, the most proper accelerating voltage was within 5~10kV. Through the experiments based on it, we found that the accelerating voltage of 7.5kV enables us to get the sharpest image of the microstructure of CNT surface. Then we compared theoretical results and experimental results. Theoretical results and experimental results were agreed well.
| Published in | Nanoscience and Nanometrology (Volume 8, Issue 1) |
| DOI | 10.11648/j.nsnm.20220801.12 |
| Page(s) | 10-14 |
| Creative Commons |
This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited. |
| Copyright |
Copyright © The Author(s), 2022. Published by Science Publishing Group |
Scanning Electron Microscopy, Carbon Nanotube, Surface, Fine Structure, Accelerating Voltage
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APA Style
Nam Chol Yu, Il Man Pak. (2022). Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface. Nanoscience and Nanometrology, 8(1), 10-14. https://doi.org/10.11648/j.nsnm.20220801.12
ACS Style
Nam Chol Yu; Il Man Pak. Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface. Nanosci. Nanometrol. 2022, 8(1), 10-14. doi: 10.11648/j.nsnm.20220801.12
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Download@article{10.11648/j.nsnm.20220801.12,
author = {Nam Chol Yu and Il Man Pak},
title = {Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface},
journal = {Nanoscience and Nanometrology},
volume = {8},
number = {1},
pages = {10-14},
doi = {10.11648/j.nsnm.20220801.12},
url = {https://doi.org/10.11648/j.nsnm.20220801.12},
eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.nsnm.20220801.12},
abstract = {Carbon nanotubes (CNTs) have attracted increasing attention due to their superior physical and chemical properties such as their high electrical and thermal conductivity, great specific area, etc. Scanning electron microscopy on commercial CNTs was optimized. Based of Rayleigh level, the resolution of optical system was induced by substituting parameters of thermoelectric emission scanning electron microscope. The size of interaction range of electron-CNTs is evaluated by substituting parameters of CNTs into the equation evaluating size of Kanaya-Okayama range. Based on theoretical analytical results, the high voltage range is defined in fine structure observation of CNTs surface by thermoelectric emission scanning electron microscope. We selected the spot size as 1.5nm, the working distance as 4.3mm, and did the SEM measurement experiment changing the accelerating voltage. The effects of energy of the incident electron on the size of the electron-CNTs interaction range and the resolution of SEM were theoretically investigated. As a result, in case of microstructure observation of CNTs surface by using thermoelectric SEM, the most proper accelerating voltage was within 5~10kV. Through the experiments based on it, we found that the accelerating voltage of 7.5kV enables us to get the sharpest image of the microstructure of CNT surface. Then we compared theoretical results and experimental results. Theoretical results and experimental results were agreed well.},
year = {2022}
}
TY - JOUR T1 - Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface AU - Nam Chol Yu AU - Il Man Pak Y1 - 2022/10/31 PY - 2022 N1 - https://doi.org/10.11648/j.nsnm.20220801.12 DO - 10.11648/j.nsnm.20220801.12 T2 - Nanoscience and Nanometrology JF - Nanoscience and Nanometrology JO - Nanoscience and Nanometrology SP - 10 EP - 14 PB - Science Publishing Group SN - 2472-3630 UR - https://doi.org/10.11648/j.nsnm.20220801.12 AB - Carbon nanotubes (CNTs) have attracted increasing attention due to their superior physical and chemical properties such as their high electrical and thermal conductivity, great specific area, etc. Scanning electron microscopy on commercial CNTs was optimized. Based of Rayleigh level, the resolution of optical system was induced by substituting parameters of thermoelectric emission scanning electron microscope. The size of interaction range of electron-CNTs is evaluated by substituting parameters of CNTs into the equation evaluating size of Kanaya-Okayama range. Based on theoretical analytical results, the high voltage range is defined in fine structure observation of CNTs surface by thermoelectric emission scanning electron microscope. We selected the spot size as 1.5nm, the working distance as 4.3mm, and did the SEM measurement experiment changing the accelerating voltage. The effects of energy of the incident electron on the size of the electron-CNTs interaction range and the resolution of SEM were theoretically investigated. As a result, in case of microstructure observation of CNTs surface by using thermoelectric SEM, the most proper accelerating voltage was within 5~10kV. Through the experiments based on it, we found that the accelerating voltage of 7.5kV enables us to get the sharpest image of the microstructure of CNT surface. Then we compared theoretical results and experimental results. Theoretical results and experimental results were agreed well. VL - 8 IS - 1 ER -
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